Loading unit and processing system
AssigneeTokyo Electron Limited
InventorHiroshi KIKUCHI
Life of this patent
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Abstract
There is provided a loading unit which can avoid the need to enhance the performance of a lifting elevator mechanism, thus preventing an increase in the cost of the lifting elevator mechanism. The loading unit is configured to vertically move a substrate holder 56, holding a plurality of substrates W, into and out of a cylindrical processing container 46 upon heat treatment of the substrates W. The loading unit includes: a lifting elevator mechanism 66 for holding and vertically moving the substrate holder 56 and a cap 62; and a pressing mechanism 86, having a piezoelectric actuator 88, for upwardly pressing against the cap 62 lying at a bottom opening 44 of the processing container 46.
Claims15
A loading unit for housing a substrate holder for holding a plurality of substrates and a cap for supporting the substrate holder, and vertically moving the substrate holder and the cap into and out of a cylindrical processing container having a bottom opening to be closed by the cap, said loading unit comprising:
- a lifting elevator mechanism configured to hold and vertically move the substrate holder and the cap;
- and
- a pressing mechanism, having a piezoelectric actuator, configured to upwardly press against the cap lying at the bottom opening of the processing container.
A processing system comprising:
- a processing unit configured to carry out heat treatment of a substrate;
- a loading unit provided below the processing unit;
- and a stocker unit, provided side by side with the loading unit, configured to stock a substrate container in which a plurality of substrates are housed,
- wherein said loading unit is for housing a substrate holder for holding a plurality of substrates and a cap for supporting the substrate holder, and vertically moving the substrate holder and the cap into and out of a cylindrical processing container having a bottom opening to be closed by the cap,
- said loading unit comprising:
- a lifting elevator mechanism configured to hold and vertically move the substrate holder and the cap;
- and
- a pressing mechanism, having a piezoelectric actuator, configured to upwardly press against the cap lying at the bottom opening of the processing container.
Dependencies are inferred from the claim text.