Method and system for inspecting indirect bandgap semiconductor structure

In a multi-step process for producing semiconductor devices from an indirect bandgap semiconductor material, a method of analysing one or more properties of said material, said method comprising the steps of:

• illuminating said material with a light source;
• capturing an image of photoluminescence induced in a large area of said material by the illumination;
• and processing spatial variations in said image to determine spatial variations of said one or more properties, wherein said illuminating, capturing and processing steps are conducted within a predetermined production step of said process.

A method for analysing one or more properties of an indirect bandgap semiconductor material in a process for producing a semiconductor device from said material, said method comprising the steps of:

• illuminating said material with a light source;
• capturing an image of photoluminescence induced in a large area of said material by the illumination;
• and processing said image to determine spatial variations of said one or more properties, wherein said method may be applied to said material at any point between said material being a silicon feedstock, block or ingot and a completed device.

A system for analysing one or more properties of an indirect bandgap semiconductor material, said system comprising:

• a light source for illuminating said material;
• an image capture device for capturing an image of photoluminescence induced in a large area of said material by the illumination;
• and a processor for processing said image to analyse said one or more properties across said area.

In a multi-step process for producing semiconductor devices from an indirect bandgap semiconductor material, a system for analysing one or more properties of said material, said system comprising:

• a light source for illuminating said material;
• an image capture device for capturing an image of photoluminescence induced in a large area of said material by the illumination;
• and a processor for processing spatial variations in said image to determine spatial variations of said one or more properties.