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US 2012/0256520 A1Published application
Electromechanical transducer and method of producing the same
AssigneeCanon Kabushiki Kaisha
InventorsKazutoshi Torashima, Takahiro Akiyama, Toshio Tomiyoshi
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Abstract
An electromechanical transducer includes a first electrode; a silicon oxide film disposed on the first electrode; and a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode.
Claims8
An electromechanical transducer comprising:
- a first electrode;
- a silicon oxide film disposed on the first electrode;
- and
- a vibration film including a silicon nitride film disposed on the silicon oxide film with a space therebetween and a second electrode disposed on the silicon nitride film so as to oppose the first electrode.
1 more element
An electromechanical transducer comprising:
- a first electrode;
- an insulating film disposed on the first electrode;
- and
- a vibration film including a membrane disposed on the insulating film with a space therebetween and a second electrode disposed on the membrane on the opposite side of the space so as to oppose the first electrode, wherein
- the membrane has a tensile stress of higher than 0 MPa and not higher than 300 MPa;
- and
- the insulating film has a higher potential barrier than that of the membrane.
4 more elements
A method of producing an electromechanical transducer, comprising:
- forming a silicon oxide film on a first electrode;
- forming a sacrificial layer on the silicon oxide film;
- forming a silicon nitride film on the sacrificial layer;
- forming a second electrode on the silicon nitride film;
- and
- forming an etching-hole in the silicon nitride film and removing the sacrificial layer through the etching-hole.
3 more elements
Dependencies are inferred from the claim text.