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AssigneesToyota Motor Corporation, Toyota Motor Engineering & Manufacturing North America, Inc.
InventorsAyse Hancer-Ademuwagun, Songtao Wu, Debasish Banerjee, Minjuan Zhang, Masahiko Ishii
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A process for manufacturing stand-alone multilayer thin films is provided. The process includes providing a substrate, depositing a sacrificial layer onto the substrate and the depositing multilayer thin film onto the sacrificial layer. Thereafter, the substrate, sacrificial layer and thin film structure are exposed to chemical solutions. The chemical solution selectively reacts with the sacrificial layer to remove the sacrificial layer, thereby affording for an intact multilayer stand-alone thin film to separate from the substrate. The color and optical properties of the multilayer thin film are not affected by the removal of the sacrificial layer.
A process for manufacturing a stand-alone multilayer thin film having three or more layers, the process comprising:
The process of claim wherein the sacrificial layer is deposited using a vacuum deposition technique.
Dependencies are inferred from the claim text.