Semiconductor nanowire structure reusing suspension pads
AssigneeInternational Business Machines Corporation
InventorsJosephine B. Chang, Michael A. Guillorn, Isaac Lauer, Jeffrey W. Sleight
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AssigneeInternational Business Machines Corporation
InventorsJosephine B. Chang, Michael A. Guillorn, Isaac Lauer, Jeffrey W. Sleight
Estimating the term…
An integrated circuit apparatus is provided and includes first and second silicon-on-insulator (SOI) pads formed on an insulator substrate, each of the first and second SOI pads including an active area formed thereon, a nanowire suspended between the first and second SOI pads over the insulator substrate, one or more field effect transistors (FETs) operably disposed along the nanowire and a planar device operably disposed on at least one of the respective active areas formed on each of the first and second SOI pads.
An integrated circuit apparatus, comprising:
A method for forming an integrated circuit, the method comprising:
A method for forming an integrated circuit, the method comprising:
Dependencies are inferred from the claim text.