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US 2012/0247175 A1Published application
Method and system to compensate for temperature and pressure in piezo resistive devices
AssigneeFreescale Semiconductor, Inc.
InventorsSiddhartha Gopal Krishna, Chad S. Dawson, Vikram Varma
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Abstract
A method and system to calibrate temperature and pressure in piezo resistive devices for non-linear sensors having two variables, where a piezo resistive device such as a piezo resistive transducer (PRT) used for example in a pressure sensor system is calibrated to calculate actual/ambient temperature and pressure even though the PRT impedance is unbalanced relative to pressure.
Claims20
A method of calibrating a piezo resistive device, comprising:
- providing a piezo resistive element having a fluctuating resistivity in the piezo resistive device;
- receiving signals representative of the temperature and pressure readings of the piezo resistive device;
- calculating a first temperature as a function of the signal representative of temperature reading of the piezo resistive device;
- and
- calculating an actual pressure as a function of the first temperature and the signal representative of pressure reading of the piezo resistive device.
2 more elements
A system of calibrating a piezo resistive device, comprising:
- a piezo resistive element having a fluctuating resistivity in the piezo resistive device;
- and
- a processor for receiving signals representative of the temperature and pressure readings of the piezo resistive device;
- calculating a first temperature as a function of the signal representative of temperature reading of the piezo resistive device;
- and calculating an actual pressure as a function of the first temperature and the signal representative of pressure reading of the piezo resistive device.
2 more elements
Dependencies are inferred from the claim text.