Method for storing a pellicle
AssigneeShin-Etsu Chemical Co., Ltd.
InventorYoshihiko NAGATA
Life of this patent
Estimating the term…
Abstract
There is provided a method for packing a pellicle container in plastic resin bags, which is meant to prevent foreign particles from reaching the pellicle container and eventually the product pellicle; the points of the invention lie in that bags are either antistatic or of special cleanroom-use grade prepared and preserved in a cleanroom environment.
Claims4
A pellicle storing method comprising steps of placing a container containing a pellicle in a first bag of cleanroom-use grade, closing an opening of said first bag, placing said first bag in a second bag having an antistatic function, closing an opening of said second bag, placing said second bag in a third bag having an antistatic function, and closing an opening of said third bag.
Dependencies are inferred from the claim text.