Coating method and coating apparatus
AssigneeTokyo Electron Limited
InventorChung-Bin CHUANG
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Abstract
A coating method for coating a treatment liquid having a viscosity of 5 cp or less on a substrate includes rotating the substrate, increasing a rotation speed of the substrate while discharging the treatment liquid on the substrate from a nozzle, and repeating at least twice increasing and decreasing the rotation speed of the substrate while discharging the treatment liquid on the substrate from the nozzle.
Claims11
A coating method for coating a treatment liquid having a viscosity of 5 cp or less on a substrate, comprising:
- discharging the treatment liquid from a nozzle on a central portion of the substrate while the substrate is rotated at a first speed and then forming a coated region on a surface of the substrate with the treatment liquid by increasing a rotation speed of the substrate from the first speed to a second speed;
- enlarging the coated region by increasing the rotation speed of the substrate from the second speed to a third speed;
- uniformly distributing the treatment liquid by decreasing the rotation speed of the substrate from the third speed to a fourth speed;
- enlarging the coated region to reach a peripheral edge portion of the substrate by increasing the rotation speed of the substrate from the fourth speed to a fifth speed higher than the second speed;
- and
- stopping discharging the treatment liquid from the nozzle and uniformly distributing the treatment liquid by decreasing the rotation speed of the substrate from the fifth speed to a sixth speed.
A coating method for coating a treatment liquid having a viscosity of 5 cp or less on a substrate, comprising:
- rotating the substrate;
- and
- increasing a rotation speed of the substrate from a first speed to a second speed higher than the first speed while discharging the treatment liquid on the substrate from a nozzle, then decreasing the rotation speed of the substrate to a third speed lower than the second speed while discharging the treatment liquid on the substrate from the nozzle, then increasing the rotation speed of the substrate to a fourth speed higher than the third speed while discharging the treatment liquid on the substrate from the nozzle and then decreasing the rotation speed of the substrate to a fifth speed lower than the fourth speed while discharging the treatment liquid on the substrate from the nozzle.
A coating method for coating a treatment liquid having a viscosity of 5 cp or less on a substrate, comprising:
- rotating the substrate;
- increasing a rotation speed of the substrate while discharging the treatment liquid on the substrate from a nozzle;
- and
- repeating at least twice increasing and decreasing the rotation speed of the substrate while discharging the treatment liquid on the substrate from the nozzle.
Dependencies are inferred from the claim text.