Actinic-Ray- or Radiation-Sensitive Resin Composition, Compound and Method of Forming Pattern Using the Composition
AssigneeFUJIFILM Corporation
InventorsShuhei Yamaguchi, Akinori Shibuya
Life of this patent
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Abstract
According to one embodiment, an actinic-ray- or radiation-sensitive resin composition includes any of the compounds (A) of general formula (I) below that when exposed to actinic rays or radiation, generates an acid and a resin (B) whose rate of dissolution into an alkali developer is increased by the action of an acid. (The characters used in general formula (I) have the meanings mentioned in the description.)
Claims14
An actinic-ray- or radiation-sensitive resin composition comprising any of the compounds (A) of general formula (I) below that when exposed to actinic rays or radiation, generates an acid and a resin (B) whose rate of dissolution into an alkali developer is increased by the action of an acid,
- wherein R1 represents an optionally substituted aryl group, an optionally substituted alkyl group, an optionally substituted aralkyl group or an optionally substituted mono- or polycycloalkyl group;
- R2 represents a group having a monocycloalkyl skeleton;
- R3 represents an alkyl group or an electron withdrawing group;
- X− represents a counter anion;
- and n is 0 or 1, m is an integer of 1 to 3, l=3−m, o is an integer of 1 to 7, and p is an integer of 0 to 6,
- provided that when 1 is 2, two R's may be identical to or different from each other, and may be bonded to each other to thereby form a ring, and that R2s, R3s, and n's may be identical to or different from each other.
Compounds of general formula (I),
- wherein R1 represents an optionally substituted aryl group, an optionally substituted alkyl group, an optionally substituted aralkyl group or an optionally substituted mono- or polycycloalkyl group;
- R2 represents a group having a monocycloalkyl skeleton;
- R3 represents an alkyl group or an electron withdrawing group;
- X− represents a counter anion;
- and n is 0 or 1, m is an integer of 1 to 3, l=3−m, o is an integer of 1 to 7, and p is an integer of 0 to 6,
- provided that when 1 is 2, two R1s may be identical to or different from each other, and may be bonded to each other to thereby form a ring, and that R2s, R3s, and n's may be identical to or different from each other.
Dependencies are inferred from the claim text.