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US 2012/0237691 A1Published application
Method of forming metal oxide film
AssigneeElectronics and Telecommunications Research Institute
InventorsJonghyurk Park, Jeong Young Park
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Abstract
Provided is a method of forming a metal oxide film. In the method, a metal oxide film is formed on a substrate using a coating solution including a metal precursor, and electrical conductivity of the metal oxide film is controlled.
Claims15
A method of forming a metal oxide film, comprising:
- forming a metal oxide film on a substrate using a coating solution including a metal precursor;
- and
- controlling electrical conductivity of the metal oxide film.
Dependencies are inferred from the claim text.