Device for alignment of two substrates
AssigneeEV Group E. Thallner GmbH
InventorDaniel Figura
Life of this patent
Estimating the term…
Abstract
Device and method for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate which can be held on a second platform. The device includes first X-Y positions of first alignment keys located along the first contact surface, and second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located along the second contact surface, wherein the first contact surface can be aligned based on the first X-Y positions in the first alignment position and the second contact surface can be aligned based on the second X-Y positions in the second alignment position.
Claims10
Device for alignment of the first contact surface of a first substrate which can be held on a first platform with a second contact surface of a second substrate which can be held on a second platform with the following features:
- first X-Y positions of first alignment keys located along the first contact surface an be detected by first detection means in the first X-Y plane in a first X-Y coordinate system which is independent of the motion of the first substrate,
- second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located along the second contact surface can be detected by second detection means in a second X-Y plane which is parallel to the first X-Y plane in a second X-Y coordinate system which is independent of the motion of the second substrate,
- the first contact surface can be aligned based on the first X-Y positions in the first alignment position and the second contact surface can be aligned based on the second X-Y positions in the second alignment position.
Method for alignment of the first contact surface of a first substrate which can be held on a first platform with a second contact surface of a second substrate which can be held on a second platform with the following steps:
- arrangement of the first contact surface in the first X-Y plane and the second contact surface in the second X-Y plane which is parallel to the first X-Y plane,
- detection of X-Y positions of first alignment keys located along the first contact surface in the first X-Y coordinate system which is independent of the motion of the first substrate by first detection means and detection of X-Y positions of second alignment keys which correspond to the first alignment keys and which are located along the second contact surface in a second X-Y coordinate system independent of the motion of the second substrate by second detection means, and
- alignment of the first contact surface in the first alignment position determined on the basis of the first X-Y positions and alignment of the second contact surface in the second alignment position which is determined based on the second X-Y positions and which lies opposite the first contact surface.
Dependencies are inferred from the claim text.