Substrate treating apparatus

Abstract

A substrate treating apparatus includes a pod storage unit 9 between a substrate treating unit 11 and a pod storage and transport unit 7, with a transport robot 19 transporting FOUPs 3 between a load port 5 and a rack array 33. A transport robot 31 transports the FOUPs 3 between the rack array 33, a rack array 69 and a receiver 27. The transportation between the load port 5 and rack array 33 and the transportation between the rack array 69, rack array 33 and receiver 27 can be carried out substantially in parallel. As a result, the efficiency of transporting the FOUPs 3 can be improved to improve throughput. Moreover, an increase in apparatus size can be inhibited since only the pod storage unit 9 is disposed between the pod storage and transport unit 7 and substrate treating unit 11. The capacity for storing the FOUPs 3 can be increased to make effective use of the high throughput of the apparatus.

Dependencies are inferred from the claim text.