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US 2012/0236273 A1Published application
Target supply unit
AssigneeGigaphoton Inc.
InventorsHidenobu KAMEDA, Hakaru MIZOGUCHI
Life of this patent
Estimating the term…
Abstract
A target supply unit may include: a reservoir for storing a target material; a heater provided inside the reservoir for heating the target material stored in the reservoir; a heater power supply for supplying current to the heater; and a target outlet for outputting the target material stored inside the reservoir.
Claims10
A target supply unit comprising:
- a reservoir for storing a target material;
- a heater provided inside the reservoir for heating the target material stored in the reservoir;
- a heater power supply for supplying current to the heater;
- and
- a target outlet for outputting the target material stored inside the reservoir.
2 more elements
A target supply unit, comprising:
- a reservoir for storing a target material;
- an infrared heater provided outside the reservoir for heating the target material stored in the reservoir by radiated heat;
- a heater power supply for supplying current to the infrared heater;
- and
- a target outlet for outputting the target material stored inside the reservoir.
2 more elements
A target supply unit comprising:
- a reservoir for storing a target material;
- an induction heater provided outside the reservoir for heating the target material stored in the reservoir by induction heating;
- a high-frequency power supply for supplying high-frequency current to the induction heater;
- and
- a target outlet for outputting the target material stored inside the reservoir.
2 more elements
Dependencies are inferred from the claim text.