Inkjet head and method of manufacturing the same

An inkjet head comprising:

• a substrate which is formed of a piezoelectric material, the substrate including a plurality of grooves that are arranged at intervals;
• a nozzle plate which is fixed onto the substrate by an adhesive, the nozzle plate including a plurality of nozzles that are formed by laser processing to communicate with the grooves;
• a plurality of electrodes to which a driving voltage that deforms the grooves is applied, the electrodes being formed on respective internal surfaces of the grooves;
• a first inorganic film which is superposed on the electrodes, the first inorganic film having a flat surface that is apart from the electrodes;
• a second inorganic film which is superposed on the first inorganic film;
• and
• a third inorganic film which is superposed on the second inorganic film, the third inorganic film being soaked in ink that is supplied to the grooves.

A method of manufacturing an inkjet head, comprising:

• forming a plurality of grooves, which are to be supplied with ink, at intervals in a substrate that is formed of a piezoelectric material;
• superposing a plurality of metal layers to cover internal surfaces of the grooves, and thereby forming electrodes on the respective internal surfaces of the grooves;
• superposing a first inorganic film on the electrodes to cover the electrodes;
• superposing a second inorganic film on the first inorganic film;
• fixing a nozzle plate onto the substrate by an adhesive, and thereby closing an end of each of the grooves by the nozzle plate;
• and
• applying laser light to the nozzle plate toward the grooves, and thereby forming a plurality of nozzles, which are opened to the grooves, in the nozzle plate.