Seal anchor structures
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorDenis Endisch
Life of this patent
Estimating the term…
Abstract
This disclosure provides systems, methods and apparatus for forming raised anchor structures in a seal area. In one aspect, the anchor structures include a receiving space. Sealant can flow into the receiving spaces. In one aspect the receiving space is formed by an overhang section. In one aspect, the overhang can be formed in part by removing a sacrificial layer. The raised anchor structures in the seal area can improve adhesion between two plates by acting as mechanical hooks, further securing the plates together.
Claims33
An electronic device, comprising:
- a substrate having an array of electromechanical devices and a seal area;
- a plurality of raised anchor structures positioned in the seal area of the substrate;
- a backplate;
- and
- a sealant disposed in the seal area between the substrate and the backplate.
A display package comprising:
- a substrate having an array of electromechanical devices, a backplate, and a sealant disposed between the substrate and the backplate;
- and
- a means for anchoring the sealant to the substrate, wherein the anchoring means is formed on the substrate and circumscribes the array.
A method of fabricating an electromechanical systems device package, comprising:
- providing a substrate and a backplate;
- forming an array of electromechanical systems devices on the substrate;
- and
- forming a plurality of raised anchor structures on the substrate in a seal area circumscribing the array of electromechanical systems devices.
Dependencies are inferred from the claim text.