System and method for managing information about wafer carrier in buffer
AssigneeSamsung Electronics Co., Ltd.
InventorsHyun Jae Yi, Byung Soo Park, Sang Hyuk Park, In Cheol Kim, Chang Soo Lee
Life of this patent
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Abstract
The wafer carrier information management system includes a reader unit for reading wafer carrier information from a transmitting/receiving unit attached to a wafer carrier in a buffer, and a reader unit controller for collecting the wafer carrier information from the reader unit. The system may further include a buffer controller for collecting the wafer carrier information from the reader unit controller, and a wafer manager for receiving the wafer carrier information from the buffer controller.
Claims15
A wafer carrier information management system, comprising:
- one or more reader units each configured to read information about a wafer carrier, loaded in a buffer corresponding thereto, from a transmitting/receiving unit attached to the wafer carrier;
- and
- at least one reader unit controller configured to receive wafer carrier information read by at least one of the reader units and store the received wafer carrier information.
A wafer carrier information management method, comprising:
- reading information about a wafer carrier loaded in a buffer from a transmitting/receiving unit attached to the wafer carrier using a reader unit corresponding to the buffer from among one or more reader units;
- and
- collecting the read information from the one or more reader units;
- and
- transmitting the collected information to a wafer manager.
Dependencies are inferred from the claim text.