Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device
AssigneeSeiko Epson Corporation
InventorsToshihiro II, Matsutaro NAITO
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AssigneeSeiko Epson Corporation
InventorsToshihiro II, Matsutaro NAITO
Estimating the term…
A piezoelectric vibration element includes: a piezoelectric substrate; excitation electrodes that are arranged so as to face each other on both principal faces of the piezoelectric substrate; drawn-out electrodes; and pads. The piezoelectric substrate includes an excitation portion that is located at the center and a peripheral portion that is thin-walled to be thinner than the thickness of the excitation portion and is disposed on a peripheral edge thereof. The pads have support areas that fix the piezoelectric substrate to a support member at positions of the piezoelectric substrate corresponding to corner portions. The excitation electrodes are formed over the excitation portion and a vibration area that is at least a part of the peripheral portion.
A piezoelectric vibration element comprising:
A piezoelectric vibration element comprising:
Dependencies are inferred from the claim text.