Substrate support jig
AssigneeFuji Electric Co., Ltd.
InventorNoboru Kurata
Life of this patent
Estimating the term…
Abstract
A substrate support jig that reduces residual droplets liable to remain on a support contact point of a thin plate substrate and the substrate support jig is disclosed. The substrate support jig used for cleaning a substrate and subsequently carrying out a Marangoni drying includes a support plate for holding the substrate upright, wherein the support plate has a groove at a contact point for supporting the substrate, and a contact angle of a surface of the support plate in case of pure water is 15 degrees or less.
Claims12
A substrate support jig configured to clean a plurality of substrates using a batch method, and configured to subsequently carry out a Marangoni drying, comprising:
- a support plate configured to hold the plurality of the substrates upright in parallel at predetermined intervals, wherein
- the support plate includes grooves at the predetermined intervals as contact points configured to support the plurality of substrates.
A substrate support jig configured to clean a substrate and to subsequently carry out a Marangoni drying, comprising:
- a support plate configured to hold the substrate upright, wherein
- the support plate includes a groove at a contact point configured to support the substrate, and
- a contact angle of a surface of the support plate in the case of pure water is 15 degrees or less.
Dependencies are inferred from the claim text.