Cleaning method
AssigneeSumco Corporation
InventorsMakoto Takemura, Keiichiro Mori
Life of this patent
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Abstract
To provide a cleaning method which makes it possible to reduce alkaline component mixing in an ozone cleaning solution, thereby preventing impairment of cleaning ability of ozone. In the cleaning method, before chuck members retain another workpiece having previously been dipped in an ozone cleaning solution in an ozone cleaning tank, alkaline component attached to part of transfer arms and the chuck members is removed by cleaning, thereby preventing the alkaline component from mixing into the ozone cleaning solution.
Claims6
A method of cleaning a plurality of workpieces using a cleaning apparatus having a plurality of cleaning tanks including an ozone cleaning tank filled with an ozone cleaning solution and an alkaline cleaning tank filled with a solution containing an alkaline component, and a transfer means having transfer arms and chuck members provided on the transfer arms, which is movable between the plurality of cleaning tanks, comprising:
- with one workpiece of a plurality of workpieces being detachably retained by the chuck members, dipping the workpiece into a cleaning solution in one of the plurality of cleaning tanks at least together with the chuck members and part of the transfer arms;
- then detaching the chuck members from the workpiece to move the transfer means during treatment of the workpiece in the cleaning tank;
- and
- detachably retaining another workpiece having been dipped in a cleaning solution of another cleaning tank using the chuck member,
- wherein before the chuck members retain the other workpiece having previously been dipped in the ozone cleaning solution in the ozone cleaning tank, alkaline component attached to part of the transfer arms and the chuck members is removed by cleaning, thereby preventing the alkaline component from mixing into the ozone cleaning solution.
Dependencies are inferred from the claim text.