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US 2012/0234238 A1Published application
Integrated metrology for wafer screening
OwnerWei-Yung Hsu, Hua Chung +2inventors
InventorsWei-Yung Hsu, Hua Chung, Ting-Ruei Shiu, Jie Cui
Life of this patent
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Abstract
Integrated wafer or substrate bow measurement modules are described. For example, a multi-chamber system includes a chamber housing a bow measurement module. In another example, a method of pre-screening a wafer includes inserting a wafer or a substrate into a multi-chamber system. A bow parameter of the wafer or the substrate is measured in a bow measurement module housed in a chamber of the multi-chamber system.
Claims20
A multi-chamber system, comprising:
- a chamber;
- and
- a bow measurement module housed in the chamber.
A method of pre-screening a wafer, the method comprising:
- inserting a wafer or a substrate into a multi-chamber system;
- and
- measuring a bow parameter of the wafer or the substrate in a bow measurement module housed in a chamber of the multi-chamber system.
Dependencies are inferred from the claim text.