Non-transitory computer-readable storage medium, decision method and computer

A decision method of deciding an exposure condition in an exposure apparatus including an illumination optical system for illuminating a mask, and a projection optical system for projecting an image of a pattern of the mask onto a substrate, the method comprising:

• a step of calculating values of an evaluation item to be used to evaluate an image formed on an image plane of the projection optical system in comparison with a target pattern to be formed on the substrate while changing parameter values included in the exposure condition, and deciding, as the parameter values included in the exposure condition, parameter values corresponding to a value of the evaluation item satisfying a target value,
• wherein the evaluation item includes an evaluation item of interest that is an evaluation item on which focus is to be placed and an auxiliary evaluation item which is different from the evaluation item of interest and changes a value in a case where a value of the evaluation item of interest does not change when the parameter values are changed.

A decision method of deciding an exposure condition in an exposure apparatus including an illumination optical system for illuminating a mask, and a projection optical system for projecting an image of a pattern of the mask onto a substrate, the method comprising:

• a step of calculating values of an evaluation item to be used to evaluate an image formed on an image plane of the projection optical system in comparison with a target pattern to be formed on the substrate while changing parameter values included in the exposure condition, and deciding, as the parameter values included in the exposure condition, parameter values corresponding to a value of the evaluation item satisfying a target value,
• wherein the evaluation item includes an evaluation item of interest that is an evaluation item on which focus is to be placed and an auxiliary evaluation item which is different from the evaluation item of interest and takes an abnormal value when the image formed on the image plane of the projection optical system is abnormal.