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US 2012/0231393 A1Published application
Actinic-ray- or radiation-sensitive resin composition and method of forming a pattern using the same
AssigneeFUJIFILM Corporation
InventorsKana FUJII, Tomotaka TSUCHIMURA, Toru FUJIMORI, Hidenori TAKAHASHI, Takayuki ITO
Life of this patent
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Abstract
According to one embodiment, an actinic-ray- or radiation-sensitive resin composition includes a resin that is decomposed when acted on by an acid to thereby increase its solubility in an alkali developer, a compound that generates an acid when exposed to actinic rays or radiation, and any of basic compounds of general formula (1) below.
Claims9
An actinic-ray- or radiation-sensitive resin composition comprising:
- a resin that is decomposed when acted on by an acid to thereby increase its solubility in an alkali developer,
- a compound that generates an acid when exposed to actinic rays or radiation, and
- any of basic compounds of general formula (1) below,
- in which
- each of l, m, o, p and q independently is an integer of 1 or greater,
- n is an integer of 2 or greater,
- each of r and s independently is an integer of 1 or greater,
- t is an integer of 0 or greater,
- each of —X1— and —X2— independently represents —O—, —S— or —CO—,
- each of R1 and R2 independently represents a hydrogen atom, an alkyl group, an aryl group or an aralkyl group, and
- R3 represents a hydrogen atom, an alkyl group, an aryl group or an aralkyl group when n is 3 or greater and t is 1 or greater;
- represents an alkyl group, an aryl group or an aralkyl group when t is 0;
- and represents an aryl group or an aralkyl group when n is 2.
10 more elements
Dependencies are inferred from the claim text.