Transparent electrode substrate, precursor transparent electrode substrate, and method for manufacturing transparent electrode substrate

Abstract

In a transparent electrode substrate including a transparent electrode film composed of a crystallized ITO film in which an ITO film is crystallized by annealing, the present invention has an object of blocking movement of substances such as volatile components within a color filter layer to the transparent electrode film. The transparent electrode substrate (1) of the present invention includes a transparent substrate (2), an amorphous transparent conductive film (5) disposed on the upper side of the aforementioned transparent substrate (2), and a transparent electrode film (4) disposed on the upper side of the aforementioned amorphous transparent conductive film (5) and composed of a crystallized ITO film. Here, the transparent electrode film (4) is obtained by annealing the ITO film formed by a sputtering method or the like, and at the time of this annealing, the amorphous transparent conductive film (5) maintains the amorphous state and blocks the movement of the substances to the transparent electrode film (4) from the color filter layer (3) that is underneath it.

Dependencies are inferred from the claim text.