Donor substrate, patterning method, and method for producing device
AssigneeToray Industries, Inc.
InventorsShigeo Fujimori, Yasuaki Tanimura, Seiichiro Nishimura
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AssigneeToray Industries, Inc.
InventorsShigeo Fujimori, Yasuaki Tanimura, Seiichiro Nishimura
Estimating the term…
A donor substrate including a support; a light-to-heat conversion layer and a transfer prevention layer formed on the support; and a transferring material layer formed on a top surface of the light-to-heat conversion layer and the transfer prevention layer; where a transfer region and an antitransfer region are formed by combinations of the light-to-heat conversion layer and the transfer prevention layer, and the transferring material layer is formed on the whole surface of the transfer region and at least one part of the antitransfer region. A patterning method enables large-scale and high-accuracy fine patterning at low cost without causing deterioration of characteristics of thin films, which constitute devices such as organic light emitting devices, and a method for producing a device.
A donor substrate comprising a support;
A method for producing a device, which comprises patterning at least one layer of layers constituting a device by the method according to 8.
Dependencies are inferred from the claim text.