US 2012/0230805 A1 · SUBSTRATE CONVEYING METHOD, RECORDING MEDIUM IN WHICH PROGRAM IS RECORDED FOR CAUSING SUBSTRATE CONVEYING METHOD TO BE EXECUTED, AND SUBSTRATE CONVEYOR

Abstract

A substrate conveying method conveying a layered body having first and second substrates stacked with a spacer member provided between their respective bottom surfaces facing each other includes receiving the first substrate by holding the first substrate from below its bottom surface using a first holding mechanism provided on a side of a first fork provided above a second fork, and turning the first fork upside down and placing the received first substrate on the second fork; receiving the spacer member held in a substrate holding part by holding the spacer member from above using a second holding mechanism provided on the same side of the first fork as the first holding mechanism, and placing the received spacer member on the first substrate; and holding the second substrate from above its top surface using the first holding mechanism, and placing the received second substrate on the spacer member.

Claims17

Dependent claims

A substrate conveying method conveying a layered body having a first substrate and a second substrate stacked in layers with a spacer member provided between respective bottom surfaces thereof facing each other, the substrate conveying method comprising:

receiving the first substrate accommodated in an accommodating part by holding the first substrate from below the bottom surface thereof using a first holding mechanism provided on a side of a first fork provided above a second fork, and turning the first fork upside down and placing the received first substrate on the second fork;
receiving the spacer member held in a substrate holding part by holding the spacer member from above the spacer member using a second holding mechanism provided on the same side of the first fork as the first holding mechanism, and placing the received spacer member on the first substrate placed on the second fork;
and
holding the second substrate accommodated in the accommodating part from above a top surface thereof using the first holding mechanism, and placing the received second substrate on the spacer member placed over the second fork.

1 more element

A substrate conveyor, comprising:

a first fork configured to move toward and away from a substrate holding part and to transfer a layered body to and from the substrate holding part, the layered body having two substrates stacked in layers with a spacer member provided between respective bottom surfaces thereof facing each other;
a second fork provided above the first fork, the second fork being configured
to move toward and away from each of a accommodating part accommodating the substrates and the substrate holding part,
to turn upside down,
to transfer the substrates one by one between the accommodating part and the first fork, and
to transfer the spacer member between the substrate holding part and the first fork;
a first holding mechanism provided on a side of the second fork and configured to hold the substrates one at a time from above or below the substrates;
and
a second holding mechanism provided on the same side of the second fork as the first holding mechanism and configured to hold the spacer member from above the spacer member.

6 more elements

Dependencies are inferred from the claim text.

Substrate conveying method, recording medium in which program is recorded for causing substrate conveying method to be executed, and substrate conveyor

Life of this patent

Substrate conveying method, recording medium in which program is recorded for causing substrate conveying method to be executed, and substrate conveyor

Life of this patent

Abstract

Claims17