Resistance heater
AssigneeMomentive Performance Materials Inc.
InventorsYuji Morikawa, Yoshihiko Matsui, Akinobu Otaka, Takeshi Higuchi, Kensuke Fujimura, Zhong-Hao Lu
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Abstract
A resistance heater is shown and described. The resistance heater may include a body. The body may include at least one heating surface, the heating surface being generally smooth and generally flat and a recess formed in the body, at least a portion of the body having a cross-sectional shape selected from the group consisting of: generally U shape, generally I-shape, and generally H-shape, and where the cross-sectional shape extends along at least a portion of the body.
Claims20
A resistance heater comprising:
- a body comprising:
- at least one heating surface, the heating surface being generally smooth and generally flat;
- a recess formed in the body, at least a portion of the body having a cross-sectional shape selected from the group consisting of:
- generally U shape, generally I-shape, and generally H-shape;
- and
- wherein the cross-sectional shape extends along at least a portion of the body.
A method for processing a semiconductor wafer comprising the steps of:
- a) providing a resistance heater having a body having at least one heating surface, the heating surface being generally smooth and generally flat;
- a recess formed in the body, at least a portion of the body having a generally horizontally symmetrical cross-sectional shape;
- and wherein the cross-sectional shape extends along at least a portion of the body;
- b) supporting a semiconductor wafer on the at least one heating surface;
- c) applying an electric current to the heater;
- and
- d) heating the semiconductor wafer to a predetermined temperature.
The method of claim 11 wherein the first and second end portions include a terminal connecting hole.
The method of claim 12, wherein the first and second end portions have substantially identical width to a heating area defined between the first and second end portions, and said recess is not formed at the first and second end portions.
A resistance heater comprising:
- a body comprising:
- at least one heating surface, the heating surface being generally smooth and generally flat;
- a recess formed in the body, at least a portion of the body having a generally horizontally symmetrical cross-sectional shape;
- and
- wherein the cross-sectional shape extends along at least a portion of the body.
Dependencies are inferred from the claim text.