Surface wave plasma generating antenna and surface wave plasma processing apparatus
AssigneeTokyo Electron Limited
InventorsTaro IKEDA, Shigeru Kasai, Yuki Osada
Life of this patent
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Abstract
A surface wave plasma generating antenna serves to generate a surface wave plasma in a chamber by radiating into the chamber a microwave transmitted from a microwave output section through a coaxial waveguide including an outer conductor and an inner conductor. The surface wave plasma generating antenna is formed in a planar shape and has a plurality of slots arranged in a circumferential direction, and each joint portion between two adjacent slots in the circumferential direction is overlapped with at least one of the slots in a diametrical direction.
Claims13
A surface wave plasma generating antenna for generating a surface wave plasma in a chamber by radiating into the chamber a microwave transmitted from a microwave output section through a coaxial waveguide including an outer conductor and an inner conductor, wherein
- the surface wave plasma generating antenna is formed in a planar shape and has a plurality of slots arranged in a circumferential direction;
- and
- each joint portion between two adjacent slots in the circumferential direction is overlapped with at least one of the slots in a diametrical direction.
Dependencies are inferred from the claim text.