Film-thickness measuring device and calibration method thereof

A film-thickness measuring device, characterized in that:

• the film-thickness measuring device comprises:
• at least two fixing base respectively disposed in different calibration positions for holding different calibration plates;
• a carrier machine table disposed beside the fixing bases for carrying a substrate waiting to be measured and saving a label of the present substrate;
• and
• a measuring head disposed above the fixing bases and the carrier machine table, receiving the label of the substrate from the carrier machine table, obtaining parameters of the calibration position that the label corresponds to from a saved corresponding relationship, and moving to a top of the calibration position that the obtained parameters correspond to, and then measuring film-thickness of the calibration plate on the fixing base disposed in the calibration position to achieve calibration, wherein the corresponding relationship is a corresponding relationship between the label and parameters of the calibration position.

A calibration method of a film-thickness measuring device, characterized in that:

• the film-thickness measuring device comprises at least two fixing bases, a carrier machine table and a measuring head, and the fixing bases are respectively disposed in different calibration positions for holding different calibration plates;
• the carrier machine table is disposed beside the fixing bases for carrying a substrate waiting to be measured and saves a label of the substrate which is presently being carried;
• the measuring head is disposed above the fixing bases and the carrier machine table;
• the calibration method is executed by the measuring head and comprises steps of:
• receiving a label of the substrate which is presently being carried from the carrier machine table;
• obtaining parameters of the calibration position that the label corresponds to from a saved corresponding relationship, wherein the corresponding relationship is a corresponding relationship between the label and parameters of the calibration position;
• moving to a top of the calibration position that the obtained parameters correspond to;
• and
• measuring film-thickness of the calibration plate on the fixing base disposed in the calibration position to achieve calibration.