Temperature measuring method, storage medium, and program

A computer readable recording medium having recorded thereon a program for executing, in a computer, a temperature measuring method for measuring a temperature of an object to be measured at a measurement point based on an interference wave of a reflected light received by a light receiving unit, by using a temperature measuring apparatus comprising a light source, a transmitting unit which transmits a light from the light source to the measurement point of the object that is a substrate on which a thin film is formed, and the light receiving unit which receives the reflected light reflected from the object,

• wherein the program enables the computer to operate as:
• a measuring unit which measures a first interference wave caused by a reflected light which is reflected at surface of the substrate and received by the light receiving unit, and a second interference wave caused by reflected lights from an interface between the substrate and the thin film formed on the substrate and from a rear surface of the thin film;
• a first calculating unit which calculates an optical path length from the first interference wave to the second interference wave;
• a second calculating unit which calculates a film thickness of the thin film based on an intensity of the second interference wave;
• a third calculating unit which calculates an optical path difference between an optical path length of the substrate and the calculated optical path length, based on the calculated film thickness of the thin film;
• a compensating unit which compensates for the calculated optical path length from the first interference wave to the second interference wave based on the calculated optical path difference;
• and
• a fourth calculating unit which calculates a temperature of the object at the measurement point based on the compensated optical path length.

A computer executable program recorded in a recording medium for a computer to execute a temperature measuring method for measuring a temperature of an object to be measured at a measurement point based on an interference wave of a reflected light received by a light receiving unit, by using a temperature measuring apparatus comprising a light source, a transmitting unit which transmits a light from the light source to the measurement point of the object that is a substrate on which a thin film is formed, and the light receiving unit which receives the reflected light reflected from the object,

• the program enabling the computer to operate as:
• a measuring unit which measures a first interference wave caused by a reflected light which is reflected at a surface of the substrate and received by the light receiving unit, and a second interference wave caused by reflected lights from an interface between the substrate and the thin film formed on the substrate and from a rear surface of the thin film;
• a first calculating unit which calculates an optical path length from the first interference wave to the second interference wave;
• a second calculating unit which calculates a film thickness of the thin film based on an intensity of the second interference wave;
• a third calculating unit which calculates an optical path difference between an optical path length of the substrate and the calculated optical path length, based on the calculated film thickness of the thin film;
• a compensating unit which compensates for the calculated optical path length from the first interference wave to the second interference wave based on the calculated optical path difference;
• and
• a fourth calculating unit which calculates a temperature of the object at the measurement point based on the compensated optical path length.