Test Unit and Test System
OwnerYohei Sato, Kenichi Kataokainventors
Life of this patent
Estimating the term…
Loading patent…
OwnerYohei Sato, Kenichi Kataokainventors
Estimating the term…
A test unit to be used with a tester that tests an electrical characteristic of a circuit formed in a wafer includes a tester a board electrically connected to the tester; a first wireless port mounted on a lower surface of the tester board and electrically connected to the tester; a probe board that includes a probe to be in contact with an electrode pad of the electronic circuit, and is configured so that the probe board may be transferred along with the wafer into the system box while the probe and the electrode pad are in contact with each other; a second wireless port that is mounted on an upper surface of the probe board and electrically connected to the probe, and carries out contactless transmission/reception with the first wireless port; a chuck plate that is away from the tester board, and holds the probe board and the wafer; and a flexible expandable chamber that may be inflated by introducing gas thereinto.
A test unit to be used with a tester that tests an electrical characteristic of an electronic circuit formed in a wafer, the test unit comprising:
Dependencies are inferred from the claim text.