Back to results
US 2012/0074598 A1Published application
Chip, method for producing a chip and device for laser ablation
AssigneeInfineon Technologies AG
InventorFranz-Peter Kalz
Life of this patent
Estimating the term…
Abstract
In various embodiments, a chip may include a substrate; a coating, the coating covering the substrate at least partially and the coating being designed for being stripped at least partially by means of laser ablation; wherein between the substrate and the coating, a laser detector layer is arranged at least partially, the laser detector layer being designed for generating a detector signal for ending the laser ablation.
Claims17
A chip, comprising:
- a substrate;
- and
- a coating, the coating covering the substrate at least partially and the coating being designed for being stripped at least partially by means of laser ablation;
- wherein between the substrate and the coating, a laser detector layer is arranged at least partially, the laser detector layer being designed for generating a detector signal for ending the laser ablation.
1 more element
A device for laser ablation, comprising:
- a laser, the laser being arranged for stripping a coating from a chip;
- and
- a detector, the detector being designed for detecting a detector signal which is emitted by a laser detector layer applied to the chip.
A method for producing a chip, the method comprising:
- applying a laser detector layer onto a substrate of the chip;
- applying a coating on the substrate of the chip;
- stripping the coating by means of a laser;
- generating a detector signal by the laser detector layer when a laser beam generated by the laser impinges on the laser detector layer;
- detecting the detector signal;
- and
- controlling the laser ablation on the basis of the detector signal.
4 more elements
Dependencies are inferred from the claim text.