Plating apparatus and plating method
AssigneeIbiden Co., Ltd.
InventorsYasuaki TACHI, Shigeki Sawa, Toshiyuki Kasuga
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AssigneeIbiden Co., Ltd.
InventorsYasuaki TACHI, Shigeki Sawa, Toshiyuki Kasuga
Estimating the term…
A method for plating a belt substrate including conveying a belt substrate through a plating tank, contacting an immersed cathode power-supply device and/or an auxiliary cathode power-supply device with the belt substrate conveyed into the interior of the plating tank such that the belt substrate becomes a cathode, and electrically plating a surface of the belt substrate in the interior of the plating tank while the immersed cathode power-supply device and/or the auxiliary cathode power-supply device maintains cathode power-supply to the belt substrate conveyed into the interior portion of the plating tank. The immersed cathode power-supply device and the auxiliary cathode power-supply device are positioned in the interior portion of the plating tank and are electrically connected by a short circuit wiring.
A method for plating a belt substrate, comprising:
Dependencies are inferred from the claim text.