US 2012/0073958 A1 · TUBULAR TARGET AND PRODUCTION METHOD

Abstract

A tubular target formed of molybdenum or a molybdenum alloy has an oxygen content of less than 50 μg/g, a density of greater than 99% of the theoretical density, and an average grain size of less than 100 μm. The molybdenum or molybdenum alloy tube may be produced by extrusion. In one embodiment, the molybdenum tube has a backing tube of titanium or titanium alloy. In an embodiment, the molybdenum tube has a varying wall thickness with an increase towards its ends.

Claims14

Dependent claims

A tubular target, comprising:

a molybdenum tube formed of a metal powder of Mo or Mo alloy, said molybdenum tube having:
an oxygen content less than 50 μg/g;
a density greater than 99% of a theoretical density;
and
an average grain size transversely to an axial direction of said tube of less than 100 μm;
and
a supporting tube of titanium or titanium alloy connected to said molybdenum tube by way of a material bond connection.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

13/310,140Filed 2 Dec 2011

Priority

AT AT GM 699/200514 Oct 2005

Published

29 Mar 2012

Term ends

Not estimatedThe source records don’t support an estimate.

Classification7 codes

C23C 14/3414
Cathode assembly for sputtering apparatus, e.g. Target: metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
B22F 3/20
Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted…:…
B22F 5/106
Of articles with cavities or holes, not otherwise provided for in the preceding subgroups: tube or ring forms
B22F 7/08
Of composite workpieces or articles from parts, e.g. to form tipped tools: with one or more parts not made from powder

Tubular target and production method

Life of this patent

Tubular target and production method

Life of this patent

Abstract

Claims14