Imprint system, imprint method, and non-transitory computer storage medium

An imprint method using an imprint system, the imprint system comprising:

• an imprint unit transferring a transfer pattern to a coating film formed on a substrate using a template having the transfer pattern formed on a front surface thereof to form a predetermined pattern in the coating film;
• a substrate carry-in/out station connected to the imprint unit, capable of keeping a plurality of the substrates, and carrying the substrate into/out of the imprint unit side;
• and
• a template carry-in/out station connected to the imprint unit, capable of keeping a plurality of the templates, and carrying the template into/out of the imprint unit side,
• said imprint method comprising the steps of:
• forming predetermined patterns on a predetermined number of substrates using one of the templates in the imprint unit;
• and
• then carrying the one template out of the imprint unit, and carrying another of the templates into the imprint unit and replacing the template in the imprint unit.

A non-transitory computer-readable storage medium storing a program running on a computer of a control unit controlling an imprint system to cause the imprint system to execute an imprint method,

• the imprint method being an imprint method using the imprint system, the imprint system comprising:
• an imprint unit transferring a transfer pattern to a coating film formed on a substrate using a template having the transfer pattern formed on a front surface thereof to form a predetermined pattern in the coating film;
• a substrate carry-in/out station connected to the imprint unit, capable of keeping a plurality of the substrates, and carrying the substrate into/out of the imprint unit side;
• and
• a template carry-in/out station connected to the imprint unit, capable of keeping a plurality of the templates, and carrying the template into/out of the imprint unit side,
• the imprint method comprising the steps of:
• forming predetermined patterns on a predetermined number of substrates using one of the templates in the imprint unit;
• and
• then carrying the one template out of the imprint unit, and carrying another of the templates into the imprint unit and replacing the template in the imprint unit.