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US 2012/0073372 A1Published application
Microelectromechanical system
AssigneeInfineon Technologies AG
InventorHorst Theuss
Life of this patent
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Abstract
In various embodiments, a microelectromechanical system may include a chip, a substrate, a signal generator, and a fixing structure configured to fix the chip to the substrate. The chip may be fixed in such a way that, upon an acceleration of the microelectromechanical system, the chip is moved relative to the substrate. Furthermore, a signal may be generated by the movement of the chip by means of the signal generator.
Claims14
A microelectromechanical system, comprising:
- a chip;
- a substrate;
- a signal generator;
- and
- a fixing structure configured to fix the chip to the substrate;
- wherein the chip is fixed in such a way that, upon an acceleration of the microelectromechanical system, the chip is moved relative to the substrate, and
- wherein a signal is generated by the movement of the chip by means of the signal generator.
4 more elements
Dependencies are inferred from the claim text.