Method of forming a nozzle chamber incorporating an ink ejection paddle and nozzle chamber rim

Abstract

A method of forming a printhead nozzle chamber includes steps of forming a first laminate of sacrificial layers on a substrate, the first laminate of sacrificial layers being formed as a ring on the substrate; hard-baking the first laminate of sacrificial layers to cause a shrinkage in the first laminate of sacrificial layers, the shrinkage further causing edges of the first laminate of sacrificial layers to angle inwards and form an approximate trapezoidal cross-section; depositing a TiN layer over the first laminate of sacrificial layer and the substrate, the TiN layer being inclined at portions deposited over the inwardly angled edges; etching the TiN layer to form a paddle and a nozzle chamber rim, the paddle incorporating an inner inclined portion and the nozzle chamber rim incorporating a complementary outer inclined portion, the paddle and nozzle rim defining an aperture therebetween; and removing the first laminate of sacrificial layers

Dependencies are inferred from the claim text.