Current control, memory element, memory device, and production method for current control element

A method of manufacturing a current steering element, the current steering element including:

• a first electrode;
• a second electrode;
• and a current steering layer comprising SiNx provided between the first electrode and the second electrode, the current steering element controlling a current flowing when an electrical pulse with a positive polarity and a negative polarity is applied, and said method comprising:
• determining (a) a thickness d (nm) of the current steering layer, (b) the nitrogen composition ratio x, and (c) a density D (where D=D0×1022 atoms/cm3) of hydrogen added to the current steering layer;
• and
• manufacturing the current steering element according to the thickness d, the nitrogen composition ratio x, and the density D which are determined in said determining,
• wherein said determining includes:
• determining (d) a minimum current density Jmin (A/cm2) of a current to be flown through the current steering element, (e) a maximum current density Joff (A/cm2) of a current allowed to flow through the current steering element in a blocking state, and (f) a maximum value V0 (V) of a voltage applicable between the first electrode and the second electrode;
• and
• determining (a) the thickness d, (b) the nitrogen composition ratio x, and (c) the density D (=D0×1022 atoms/cm3) all of which satisfy Formulae (3) and (4), based on (d) the minimum current density Jmin, (e) the maximum current density Joff, and (f) the maximum value V0 (V) of the voltage:
• (ln(Jmin(C·exp(α·d)exp(β·x))−1)γ)2≦V0 (3)
• (ln(Joff(C·exp(α·d)exp(β·x))−1)γ)2−(ln(Jmin(C·exp(α·d)exp(β·x))−1)γ)2/2≧0 (4)
• wherein C=k1×D0k2, α=−6.25×10−1, β=−11.7, γ=9.76, k1=5.23×10−4, and k2=−5.26.