Nanoimprint template and pattern transcription apparatus
OwnerAkiko Mimotogi, Ryoichi Inanami +5inventors
InventorsAkiko Mimotogi, Ryoichi Inanami, Kentaro Kasa, Masato Suzuki, Manabu Takakuwa, Yohko Furutono, Yumi Nakajima
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Abstract
According to one embodiment, a nanoimprint template using a pattern transcription to a substrate by a nanoimprint technique, the template includes a transcription pattern and an alignment mark on a main surface of a main body, wherein the alignment mark comprises a polarizer.
Claims11
A nanoimprint template using a pattern transcription to a substrate by a nanoimprint technique, the template comprising:
- a transcription pattern and an alignment mark on a main surface of a main body, wherein the alignment mark comprises a polarizer.
A nanoimprint template using a pattern transcription to a substrate by a nanoimprint technique, the template comprising:
- a transcription pattern and an alignment mark on a main surface of a main body, wherein the alignment mark comprises a phase difference film.
A pattern transcription apparatus executing a pattern transcription from a nanoimprint template to a substrate by a nanoimprint technique, the apparatus comprising:
- a position measurement portion measuring a position of the template;
- and
- a position control portion controlling the position of the template,
- wherein the position measurement portion comprises an interferometer detecting a change of a refractive index of a reflected light from the alignment mark of the template.
Dependencies are inferred from the claim text.