Semiconductor device and manufacturing method of the same
AssigneeRenesas Electronics Corporation
InventorsMasamichi MATSUOKA, Tatsuya Fukumura, Fumihiko Nitta
Life of this patent
Estimating the term…
Loading patent…
AssigneeRenesas Electronics Corporation
InventorsMasamichi MATSUOKA, Tatsuya Fukumura, Fumihiko Nitta
Estimating the term…
To provide a semiconductor device capable of suppressing a short circuit between an upper conductive element and a lower conductive element which constitute an MRAM, and a manufacturing method of the same. There are provided a semiconductor substrate having a main surface, a magnetic tunnel junction structure located over the main surface of the semiconductor substrate and including a pin layer, a tunnel insulating layer, and a free layer, a lower insulating layer contacting a lower side surface of the magnetic tunnel junction structure, a sidewall insulating layer located over the lower insulating layer in contact with the upper side surface of the magnetic tunnel junction structure, and exposing the top surface of the magnetic tunnel junction structure, and a conductive layer contacting the top surface of the magnetic tunnel junction structure exposed from the sidewall insulating layer.
A semiconductor device comprising:
A manufacturing method of a semiconductor device, comprising:
Dependencies are inferred from the claim text.