Thin Film Deposition Apparatus, Method of Manufacturing Organic Light-Emitting Display Device by Using the Apparatus, and Organic Light-Emitting Display Device Manufactured by Using the Method

A method of manufacturing an organic light-emitting display device by using a thin film deposition apparatus, the method comprising:

• transferring a first substrate into a first chamber such that the first substrate is fixed to a first stage and aligned with respect to a first mask;
• depositing deposition materials discharged from first and second deposition sources on the first substrate while moving the first and second deposition sources relative to the first substrate;
• transferring a second substrate into the first chamber such that the second substrate is fixed to a second stage and aligned with respect to a second mask while the deposition materials are deposited on the first substrate;
• and
• depositing deposition materials discharged from the first and second deposition sources on the second substrate while moving the first and second deposition sources relative to the second substrate.