Evaporation boat for vacuum vapor deposition and vacuum vapor deposition system
AssigneePrinco Corp.
InventorYing-Che Shih
Life of this patent
Estimating the term…
Abstract
The present invention provides an evaporation boat, comprising: a source material container configured to contain source material and provided with an opening; a cover plate disposed, with a predetermined gap, above the opening of the source material container, wherein the vertical projection of the cover plate covers the opening of the source material container, so that the scattering range of the source material vapor formed by evaporating the source material is controlled by the cover plate as the source material vapor scatters through the predetermined gap to the outside of the evaporation boat; and a supporting member connecting the source material container and the cover plate to maintain a predetermined gap therebetween.
Claims12
An evaporation boat for vapor deposition, comprising:
- a source material container configured to contain source material and provided with an opening;
- a cover plate disposed above the opening of the source material container with a predetermined gap, wherein the vertical projection of the cover plate covers the opening of the source material container, so that the diffusion range of the source material vapor formed by evaporating the source material is controlled by the cover plate as the source material vapor diffuses through the predetermined gap to the outside of the evaporation boat;
- and
- a supporting member connecting the source material container and the cover plate to maintain the predetermined gap therebetween.
A vacuum vapor deposition system, comprising:
- a vacuum chamber providing a vacuum environment;
- a workpiece rack disposed in the vacuum chamber for supporting objects to be coated;
- and
- an evaporation boat disposed in the vacuum chamber and positioned on a side of the workpiece rack, the evaporation boat comprising:
- a source material container configured to contain source material and provided with an opening;
- a cover plate disposed above the opening of the source material container with a predetermined gap, wherein the vertical projection of the cover plate covers the opening of the source material container, so that the scattering range of the source material vapor formed by evaporating the source material is controlled by the cover plate as the source material vapor scatters through the predetermined gap to the objects to be coated;
- and
- a supporting member connecting the source material container and the cover plate to maintain the predetermined gap therebetween.
Dependencies are inferred from the claim text.