Mainframe premove for a cluster tool
OwnerAtsushi Kitani, James Hoffmaninventors
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Abstract
A method and system for a mainframe premove for a cluster tool is described herein. In one embodiment, the state of a process chamber which is to be used to run a process is obtained. A determination is made of whether the state of the process chamber indicates an almost ready state. A prepare command is sent to a transfer module if the state of the process chamber indicates the almost ready state. A transfer command is sent to the process chamber if the state of the process chamber indicates the almost ready state.
Claims25
A computer-implemented method comprising:
- obtaining, by a computing device, a state of a process chamber;
- determining, by the computing device, whether the state of the process chamber indicates an almost ready state;
- sending a prepare command to a transfer module if the state of the process chamber indicates the almost ready state;
- and
- sending a transfer command to the process chamber if the state of the process chamber indicates the almost ready state.
A computer-readable storage medium comprising executable instructions to cause a processor to perform operations, the instructions comprising:
- obtaining, by a computing device, a state of a process chamber;
- determining, by the computing device, whether the state of the process chamber indicates an almost ready state;
- sending a prepare command to a transfer module if the state of the process chamber indicates the almost ready state;
- and
- sending a transfer command to the process chamber if the state of the process chamber indicates the almost ready state.
A computer system comprising:
- a memory;
- and
- a processor configurable by instructions stored in the memory to:
- obtain, by a computing device, a state of a process chamber;
- determine, by the computing device, whether the state of the process chamber indicates an almost ready state;
- send a prepare command to a transfer module if the state of the process chamber indicates the almost ready state;
- and
- send a transfer command to the process chamber if the state of the process chamber indicates the almost ready state.
Dependencies are inferred from the claim text.