Film Forming Apparatus And Method Of Manufacturing Light Emitting Device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorShunpei Yamazaki
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Abstract
The problem regarding volatileness of a solvent in an EL forming material, which occurs in adopting printing, are solved. An EL layer is formed in a pixel, portion of a light emitting device by printing. Upon formation of the EL layer, a printing chamber is pressurized to reach a pressure equal to or higher than the atmospheric pressure, and the printing chamber is filled with inert gas or set to a solvent atmosphere. Thus the difficulty in forming an EL layer by printing is eliminated.
Claims36
A method of manufacturing a light-emitting device comprising the steps of:
- pressurizing a processing chamber to a pressure;
- measuring the pressure in the processing chamber with a sensor;
- and
- printing an electroluminescence material under the pressure in the processing chamber,
- wherein the pressure is equal to or higher than the atmospheric pressure.
A method of manufacturing a light-emitting device comprising the steps of:
- pressurizing a processing chamber to a pressure;
- measuring the pressure in the processing chamber with a sensor;
- printing an electroluminescence material under the pressure in the processing chamber,
- wherein the pressure is equal to or higher than the atmospheric pressure;
- and
- wherein the electroluminescence layer comprises a light emitting layer.
A method of manufacturing a light-emitting device comprising the steps of:
- pressurizing a processing chamber to a pressure;
- measuring the pressure in the processing chamber with a sensor;
- and
- printing an electroluminescence material under the pressure in the processing chamber,
- wherein the pressure is equal to or higher than the atmospheric pressure;
- and
- wherein the electroluminescence layer comprises a hole injection layer and a light emitting layer.
Dependencies are inferred from the claim text.