Line-projection apparatus for arrays of diode-laser bar stacks
AssigneeCoherent, Inc.
InventorSivarama Krishna KUCHIBHOTLA
Life of this patent
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Abstract
In optical apparatus for illuminating a mask-plane with a line of light, a light source includes four fast-axis stacks of laser diode bars. One optical arrangement collects light beams from all of the diode-laser bar stacks, homogenizes and expands the beams in the fast-axis direction of the diode-laser bar stacks and partially overlaps the homogenized and expanded beams in the fast-axis direction. Another optical arrangement homogenizes the sum of the partially overlapped beams and images the sum of the beams as a line of light having a length in the fast-axis-direction and a width in the slow-axis direction.
Claims19
Optical apparatus for forming a line of radiation having a length and a width, the apparatus comprising:
- a plurality of spaced-apart stacks of laser-diode bars, each of the diode-laser bars having a plurality of diode-laser emitters, and having a fast-axis and a slow-axis perpendicular to the fast-axis and parallel to a length dimension of the bars, the diode-laser bars in the stacks stacked in the fast-axis direction thereof;
- a plurality of collimating arrangements corresponding in number to the number of diode-laser bars for collimating the output radiation of the diode-laser bars in the diode-laser bars stacks in at least the fast-axis direction thereby forming a plurality of output radiation beams corresponding in number to the plurality of diode-laser bar stacks;
- a first optical arrangement configured to collect the output radiation beams from all of the diode-laser bar stacks, homogenize and expand the beams in the length direction of the line of radiation and partially overlap the homogenized expanded beams in a first plane at a predetermined distance from the first optical arrangement;
- and
- a second optical arrangement configured to homogenize and image the partially overlapped and expanded beams in a second plane at a predetermined distance from the second optical arrangement to form the line of radiation, with the homogenizing and imaging being arranged such that the line of radiation has an about uniform distribution of intensity along the length thereof.
Optical apparatus for forming a line of radiation having a length and a width, the apparatus comprising:
- a plurality of spaced-apart stacks of laser-diode bars, each of the diode-laser bars having a plurality of diode-laser emitters, and having a fast-axis and a slow-axis perpendicular to the fast-axis and parallel to a length dimension of the bars, the diode-laser bars in the stacks being stacked in the fast-axis direction thereof and the stacks of diode-laser bars being aligned one above another in the fast-axis direction of the diode-laser bars;
- a plurality of collimating arrangements corresponding in number to the number of diode-laser bars for collimating the output radiation of the diode-laser bars in the diode-laser bars stacks in at least the fast-axis direction thereby forming a plurality of output radiation beams corresponding in number to the plurality of diode-laser bar stacks;
- a first optical arrangement configured to collect the output radiation beams from all of the diode-laser bar stacks, homogenize and expand the beams in the fast-axis direction radiation and partially overlap the homogenized expanded beams in a first plane at a predetermined distance from the first optical arrangement, the first optical arrangement including a plurality of pairs of cylindrical microlens arrays, one for each of the plurality of diode-laser bar stacks with each array including the same number of cylindrical microlenses as the number of diode-laser bars in the stack, the cylindrical lenses in the arrays being aligned with each other, aligned with the slow-axis of the diode-laser bars, and having positive optical power in the fast-axis and zero optical power in the slow-axis, and a first group of lens elements forming a beam expander having positive optical power in the fast-axis and zero optical-power in the slow-axis, the pairs of microlens arrays being located between the diode-laser bar stacks and the first group of lens elements;
- and
- a second optical arrangement configured to homogenize and image the partially overlapped and expanded beams in a second plane at a predetermined distance from the second optical arrangement to form the line of radiation, the second optical arrangement including one pair of cylindrical microlens arrays adjacent the first plane and arranged to intercept and transmit rays from the first optical arrangement, each array including the same number of cylindrical microlenses, the cylindrical lenses in the arrays being aligned with each other, aligned in the slow-axis direction of the diode-laser bars, and having positive optical power in the fast-axis and zero optical power in the slow-axis, and a second group of optical elements arranged such that the intercepted and transmitted rays from the one pair of microlens arrays are focused in the slow-axis direction in the second plane to define the width of the line of radiation and spread in the fast-axis direction in the second plane to form the length of the line of radiation.
Optical apparatus for forming a line of radiation having a length and a width, the apparatus comprising:
- a plurality of spaced-apart stacks of laser-diode bars, each of the diode-laser bars having a plurality of diode-laser emitters, and having a fast-axis and a slow-axis perpendicular to the fast-axis and parallel to a length dimension of the bars, the diode-laser bars in the stacks being stacked in the fast-axis direction thereof and the stacks of diode-laser bars being aligned with each other in the slow-axis direction of the diode-laser bars;
- a plurality of collimating arrangements corresponding in number to the number of diode-laser bars for collimating the output radiation of the diode-laser bars in the diode-laser bars stacks in at least the fast-axis direction thereby forming a plurality of output radiation beams corresponding in number to the plurality of diode-laser bar stacks;
- a first optical arrangement configured to collect the output radiation beams from all of the diode-laser bar stacks, homogenize and expand the beams in the slow-axis direction and partially overlap the homogenized expanded beams in a first plane at a predetermined distance from the first optical arrangement, the first optical arrangement including a plurality of pairs of cylindrical microlens arrays, one for each of the plurality of diode-laser bar stacks with each array including the same number of cylindrical microlenses as the number of diode-laser bars in the stack, the cylindrical lenses in the arrays being aligned with each other, aligned with the slow-axis of the diode-laser bars, and having positive optical power in the fast-axis and zero optical power in the slow-axis, and a first group of lens elements forming a beam expander having positive optical power in the slow-axis and zero optical-power in the fast-axis, the pairs of microlens arrays being located between the diode-laser bar stacks and the first group of lens elements;
- and
- a second optical arrangement configured to homogenize and image the partially overlapped and expanded beams in a second plane at a predetermined distance from the second optical arrangement to form the line of radiation, the second optical arrangement including one pair of cylindrical microlens arrays adjacent the first plane and arranged to intercept and transmit rays from the first optical arrangement, each array including the same number of cylindrical microlenses, the cylindrical lenses in the arrays being aligned with each other, aligned in the fast-axis direction of the diode-laser bars, and having positive optical power in the slow-axis and zero optical power in the fast-axis, and a second group of optical elements arranged such that the intercepted and transmitted rays from the one pair of microlens arrays are focused in the fast-axis direction in the second plane to define the width of the line of radiation and spread in the slow-axis direction in the second plane to form the length of the line of radiation.
Dependencies are inferred from the claim text.