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US 2012/0057270 A1Published application
Capacitor and method for making same
OwnerJuergen FOERSTERinventor
Life of this patent
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Abstract
One or more embodiments relate to a capacitor, comprising: a first electrode comprising a first layer including tantalum nitride, and a second layer including alpha-tantalum overlying the first layer; a dielectric layer; and a second electrode overlying the dielectric layer, the second electrode comprising a first layer including tantalum nitride, and a second layer including alpha-tantalum overlying the first layer.
Claims31
A capacitor, comprising:
- a first electrode comprising
- a first layer including tantalum nitride, and
- a second layer including alpha-tantalum overlying said first layer;
- a dielectric layer overlying said first electrode;
- and
- a second electrode overlying said dielectric layer, said second electrode comprising
- a first layer including tantalum nitride, and
- a second layer including alpha-tantalum overlying said first layer.
5 more elements
A capacitor, comprising:
- a first electrode comprising
- a first layer consisting essentially of tantalum nitride, and
- a second layer consisting essentially of alpha-tantalum overlying said first layer;
- a dielectric layer overlying said first electrode;
- and
- a second electrode overlying said dielectric layer, said second electrode comprising
- a first layer consisting essentially of tantalum nitride, and
- a second layer consisting essentially of alpha-tantalum overlying said first layer.
5 more elements
A capacitor, comprising:
- a first electrode comprising
- a first layer including tantalum nitride, and
- a second layer including a conductive material having a resistivity less than titanium nitride overlying said first layer;
- a dielectric layer overlying said first electrode;
- and
- a second electrode overlying said dielectric layer, said second electrode comprising
- a first layer including tantalum nitride, and
- a second layer including said conductive material.
5 more elements
A capacitor, comprising:
- a first electrode;
- a dielectric layer overlying said first electrode;
- and
- a second electrode overlying said dielectric layer, wherein said first electrode has a sheet resistance of about 10 ohms per square or less, said second electrode has a sheet resistance of about 10 ohms per square or less, said first electrode has a thickness of about 100 nm or less, said second electrode has a thickness of about 100 nm or less.
1 more element
A capacitor, comprising:
- a first electrode;
- a dielectric layer overlying said first electrode;
- and
- a second electrode,
- wherein said first electrode has a sheet resistance of about 3 ohms per square or less, said second electrode has a sheet resistance of about 3 ohms per square or less, said first electrode has a thickness of about 300 nm or less, said second electrode has a thickness of about 300 nm or less.
2 more elements
A method of making a capacitor, comprising:
- forming a first layer including tantalum nitride;
- forming a second layer over said first layer, said second layer including a conductive material having a resistivity less than titanium nitride;
- and
- etching said first layer and said second layer using a single etch chemistry.
1 more element
Dependencies are inferred from the claim text.