Method for forming a nanostructure penetrating a layer

A device comprising:

• a substrate;
• a piezoelectrical layer present on the substrate;
• an electrode operatively associated with the piezoelectric layer;
• and
• an adjustable nanostructure penetrating the piezoelectrical layer, the nanostructure having a nanoscale passageway through which a molecule to be analyzed passes, the nanostructure being adjustable by a voltage applied on the electrode for deformation of the piezoelectric layer.

A method of forming a nanostructure penetrating a layer, the method comprising:

• providing a substrate;
• forming a patterned layer on the substrate, the patterned layer having at least one opening through which the surface of the substrate is exposed;
• growing an epitaxial layer on the substrate, vertically from the opening and laterally across the patterned layer;
• maintaining the lateral growth of the epitaxial layer such that the epitaxial layer is formed over the exposed region of the substrate and such that the epitaxial layer does substantially not coalesce across the patterned layer,
• removing at least partially the patterned layer in the region where no epitaxial layer is present on the patterned layer, such that a nanostructure is formed in the epitaxial layer;
• and
• removing the substrate underlying the nanostructure forming part of the epitaxial layer.

An apparatus comprising:

• a membrane having a first and a second major surface and a membrane penetrating nanostructure between the first and second major surfaces, the nanostructure comprising a nanopore with a varying diameter across the membrane and, in cross-sectional view, a substantially triangular shape;
• a source of electromagnetic radiation that impinges radiation on the nanostructure in the direction of the first major surface;
• a translocating unit configured to translocate molecules through the nanostructure;
• and
• a detection unit configured to detect electromagnetic radiation that exits from the nanostructure away from the second major surface, transmission of electromagnetic radiation through the nanostructure being at least by excitation of surface plasmon polaritons in the nanostructure.

A method of analyzing molecules with a membrane, the membrane having a first and a second major surface and having a membrane penetrating nanostructure between the first and second major surfaces, the nanostructure comprising a nanopore with a varying diameter across the membrane and, in cross-sectional view, a substantially triangular shape, the method comprising:

• directing electromagnetic radiation onto the nanostructure in the direction of the first major surface;
• translocating molecules through the nanostructure;
• and
• detecting electromagnetic radiation that exists from the nanostructure away from the second major surface, transmission of electromagnetic radiation through the nanostructure being at least by excitation of surface plasmon polaritons in the nanostructure.