Fine-processing agent and fine-processing method
AssigneeStella Chemifa Corporation
InventorsMasayuki Miyashita, Takanobu Kujime, Keiichi Nii
Life of this patent
Estimating the term…
Abstract
Provided is a fine-processing agent which, when fine-processing a laminated film stacked at least with a silicon dioxide film and a silicon nitride film, can selectively fine-process the silicon dioxide film. Also provided is a fine-processing method utilizing the fine-processing agent. The fine-processing agent is characterized by including: (a) 0.01-15.0 weight % hydrogen fluoride and/or 0.1-40.0 weight % ammonium fluoride, (b) water, and (c) 0.001-10.00 weight % water-soluble polymer selected from among a group consisting of acrylic acid, ammonium acrylate, acrylic acid ester, acrylamide, styrenesulfonic acid, ammonium styrenesulfonate, and styrenesulfonic acid ester.
Claims16
A fine processing agent, comprising:
- (a) at least one of 0.01 to 15% by weight of hydrogen fluoride or 0.1 to 40% by weight of ammonium fluoride;
- (b) water;
- and
- (c) 0.001 to 10% by weight of a water-soluble polymer of at least one selected from the group consisting of acrylic acid, ammonium acrylate, an acrylic acid ester, acrylamide, styrenesulfonic acid, ammonium styrenesulfonate, and a styrenesulfonic acid ester.
Dependencies are inferred from the claim text.