Sputtering Target and Method of Processing a Sputtering Target

Abstract

[Object] To provide a sputtering target allowing component metals to be separated from each other by a simple process and a method of processing the sputtering target. [Solving Means] A method of processing a sputtering target according to the present invention performs a hydrogen embrittlement process with respect to a sputtering target 1 including a first target portion 3 made of a first material being a non hydrogen embrittlement material and a second target 4 portion made of a second material being a hydrogen embrittlement material, which are bonded to each other, to thereby separate from the sputtering target 1 the second target portion 4, collects the second material, and collects the first material. By utilizing difference in hydrogen embrittlement between the first material and the second material, the first material and the second material are separated from each other and collected. It is possible to efficiently collect the first material and the second material.

Dependencies are inferred from the claim text.