Arrangement for processing substrate and substrate carrier
AssigneeBeneq Oy
InventorJarmo Maula
Life of this patent
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Abstract
The invention relates to an arrangement for processing a substrate in a reaction chamber of a gas deposition apparatus by exposing the substrate to alternate, saturated surface reactions of starting materials, the arrangement comprising loading means for loading the substrate into the reaction chamber on a substrate support. In accordance with the invention, the substrate is arranged for being attached in a detachable manner with an adhesive to the substrate carrier.
Claims18
An arrangement for processing a substrate in a gas deposition apparatus by exposing the substrate to alternate surface reactions of starting materials, the arrangement comprising loading means for loading the substrate into the gas deposition apparatus on a substrate support, the substrate being arranged for attachment to the substrate support with an adhesive, wherein the substrate support consists of a tape-like structure comprising a base material and on a first side thereof a first adhesive layer, the tape-like structure being a strip, strip-like or elongated structure that is arranged for being guided through the gas deposition apparatus for exposing substrates attached thereto one or more times to surface reactions of starting material.
(canceled)
A carrier for supporting a substrate in a gas deposition apparatus as the substrate is processed by exposing it to alternate surface reactions of starting materials, the carrier comprising an adhesive layer for attaching the substrate to the carrier, wherein the carrier is a tape-like structure comprising a base material and on the first side of the base material a first adhesive layer to which one or more substrates are attachable, and the tape-like structure is folded so that the substrates may be attached between the folds, or it is bent in a spiral or other bent shape so that the substrates may be attached between the folds.
(canceled)
(canceled)
Dependencies are inferred from the claim text.