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AssigneeVon Ardenne Anlagentechnik GmbH
InventorsHubertus VON DER WAYDBRINK, Siegfried SCHEIBE, Jens MEYER, Andrej WOLF, Uwe TRAEBER, Michael HENTSCHEL
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Apparatus for continuous coating has a chamber wall which forms a processing chamber, thermal insulation which forms a processing area within the chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying in the lengthwise extension of the apparatus for continuous coating, and heating equipment which heats the substrates, is designed to minimize unwanted coating, in particular of parts of the apparatus, in order to minimize the expense of maintaining and servicing the apparatus A condensation element is positioned in the processing chamber, which extends into the processing area and binds the arising vapor through condensation.
Apparatus for continuous coating having a chamber wall, which forms a processing chamber, thermal insulation, which forms a processing area within said chamber, a transportation device for substrates located in the processing area with a substrate transportation direction of the substrates lying along a lengthwise extension of the apparatus for continuous coating, wherein the substrates overlie a substrate side of the transportation device and further including heating equipment which heats the substrate, and wherein a condensation element extending into the processing area, and binding arising vapor by condensation, is located in the processing area.
Dependencies are inferred from the claim text.